Mks Instruments, Inc.

Timothy E Kalvaitis

Ali Shajii

William M Holber

Siddharth P Nagarkatti

Daniel Goodman

John A Smith

Michael Kishinevsky

William S McKinney, Jr

Ilya Bystryak

A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

Radio frequency power delivery system

Growing community of inventors

Nashua, NH, United States of America

Timothy E Kalvaitis