Asml Netherlands B.v.

Other

United Technologies Corporation

Timothy Dugan Davis

Kaustuve Bhattacharyya

Arie Jeffrey Den Boef

Peter David Engblom

Simon Gijsbert Josephus Mathijssen

Marc Johannes Noot

Ying She

Sean C Emerson

Thomas Henry Vanderspurt

Rhonda R Willigan

Tianli Zhu

Olger Victor Zwier

Grzegorz Grzela

Ralph Timotheus Huijgen

Jan-Willem Gemmink

Jinmoo Byun

Won-Jae Jang

Salvatore Saitta

Patsy R Capparelli

Hyun-Su Kim

A method provides the steps of receiving an image from a metrology tool, determining individual units of said image and discriminating the units which provide accurate metrology values. The images are obtained by measuring the metrology target at multiple wavelengths. The discrimination between the units, when these units are pixels in said image, is based on calculating a degree of similarity between said units.

Metrology method

A method including: determining recipe consistencies between one substrate measurement recipe of a plurality of substrate measurement recipes and each other substrate measurement recipe of the plurality of substrate measurement recipes; calculating a function of the recipe consistencies; eliminating the one substrate measurement recipe from the plurality of substrate measurement recipes if the function meets a criterion; and reiterating the determining, calculating and eliminating until a termination condition is met. Also disclosed herein is a substrate measurement apparatus, including a storage configured to store a plurality of substrate measurement recipes, and a processor configured to select one or more substrate measurement recipes from the plurality of substrate measurement recipes based on recipe consistencies among the plurality of substrate measurement recipes.

Recipe selection based on inter-recipe consistency

Disclosed are a method, computer program and a metrology apparatus for measuring a process effect parameter relating to a manufacturing process for manufacturing integrated circuits on a substrate. The method comprises determining for a structure, a first quality metric value for a quality metric from a plurality of measurement values each relating to a different measurement condition while cancelling or mitigating for the effect of the process effect parameter on the plurality of measurement values and a second quality metric value for the quality metric from at least one measurement value relating to at least one measurement condition without cancelling or mitigating for the effect of the process effect parameter on the at least one measurement value. The process effect parameter value for the process effect parameter can then be calculated from the first quality metric value and the second quality metric value, for example by calculating their difference.

Metrology method and apparatus and computer program

A method for processing biomass to produce biofuel includes decomposing lignocellulosic material into byproduct polymers that include lignin, decomposing the lignin into targeted chemical fragments, and chemically converting the targeted chemical fragments into a biofuel.

Method for processing biomass

A generally rectangular blank of preferably cardboard material having a multitude of strategically positioned cut lines, fold lines, and perforated tear lines. The present invention can be formed into at least two differently shaped and sized boxes; thus, efficiently accommodating a whole pizza in its original rectangular shape, and efficiently accommodating a slice or other portion of pizza in its reduced-size, triangular shape. In addition to the typical cut and fold lines found in a common pizza box, the present invention provides, generally, eight sets of perforated tear lines strategically positioned such that a rectangularly-shaped pizza box may be torn along the perforated tear lines to form a generally triangularly-shaped, smaller dimensioned pizza box.

Method of forming a variable sized and shaped pizza box and apparatus thereof

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Portland, OR, United States of America

Timothy Dugan Davis