Wallac Oy

Afore Oy

Bluefors Cryogenics Oy

Bluefors Oy

Timo Salminen

Leif Roschier

Vesa Henttonen

Ari Kuukkala

Matti Manninen

David Gunnarsson

Aki Junes

Jarmo Nurmi

Markku Ojala

Jarmo Sakari Korpi

Aarne Heinonen

Markku Varjonen

Janne Salonen

Mika Olavi Routamaa

Jussi Petteri Lehtonen

Juha Karunen

Ilari Torsti

Paul White

A testing device () is for electrically testing integrated circuits on a wafer (). The testing device () includes a vacuum chamber (), a chuck () for holding the wafer (), a probe card () for electrically contacting the integrated circuits, and a radiation shield () arranged inside the vacuum chamber () and enclosing the chuck () and the probe card (). In the testing device (), the vacuum chamber () is provided with a gate valve (), the radiation shield () is provided with a hatch (), and the testing device () includes a wafer loading assembly () for loading the wafer () onto the chuck () through the gate valve () and the hatch ().

Testing device

The present invention provides a testing device for electrically testing integrated circuits on a wafer. The testing device comprises a vacuum chamber, a chuck for holding the wafer, a probe card for electrically contacting the integrated circuits, means for moving the chuck relative to the probe card, a first radiation shield arranged inside the vacuum chamber and enclosing the chuck and the probe card, and a cooling unit thermally connected to the first radiation shield. The means for moving the chuck relative to the probe card comprises a supporting column having a first end and a second end, the first end of the supporting column being attached to the chuck, and the first radiation shield comprises a first fixed part having a first aperture through which the supporting column is arranged to pass, and a first movable part that is attached to the supporting column and arranged to cover the first aperture.

Testing device includes radiation shields for testing integrated circuits on a wafer

A switch device for producing one or more electrical signals in response to mechanical force includes a body-part () and one or more electric transducers (-) connected to the body-part and arranged to produce the one or more electrical signals in response to mechanical force directed to the body-part. The body-part includes a cavity (), and a wall constituting the bottom of the cavity is capable of being bent by mechanical force directed to the wall from the opposite side with respect to the cavity. The one or more electric transducers are located in the cavity and arranged to produce the one or more electrical signals when the bottom of the cavity is bent. The switch device can be built, for example, into a working plane of an electrical instrument so that a plate constituting the working plane constitutes also the body-part of the switch device.

Method and a switch device for producing an electrical signal in response to mechanical force

Instrumentation and a method for efficient and reliable assaying and measuring samples. The teachings include an automated self-contained instrument, wherein the samples are located on wells of sample plates, and the instrument includes a plurality of units for processing or storing sample plates. The instrument may includes at least one dispensing unit for dispensing reagents or other assay components to the sample wells, at least two units for simultaneously processing or storing a plurality of sample plates, at least one unit for removing substance from the sample wells, and one or several measurement units for optically measuring samples in at least two measurement modes. Further, the instrument includes a manipulator for moving the sample plates in three orthogonal directions or combinations thereof and for rotating the sample plates in relation to a vertical axis for transferring the sample plates to the units.

Automated instrumentation and method for measurements of samples

Growing community of inventors

Turku, Finland

Timo Salminen