Endress+hauserse+co. Kg

Endress+hauser Gmbh+co. Kg

Timo Kober

Rafael Teipen

Benjamin Lemke

Anh Tuan Tham

Michael Philipps

Benjamin Mack

Lars Karweck

Dieter Stolze

Thomas Zieringer

Roland Werthschützky

Stefan Rummele-Werner

Bernhard Jochem

Darina Riemer Woyczehowski

Darina Woyczehowski

Sandra Hildebrandt

A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs the pressure measurement signal; first and second ceramic stiffening elements, each of which is joined with the pressure difference measuring cell and has a duct, via which the first, respectively the second, pressure is suppliable to the pressure difference measuring cell; a platform with first and second pressure input openings, each of which extends from a first surface to a second surface of the platform, wherein the pressure input openings are sealed on the first surface, each with its own isolating diaphragm, and first and second pressures tubes, which are arranged between the stiffening elements and the platform, and wherein each of the first pressure tube and the second pressure tube has at least one bend in a region between the platform and a first, respectively second, connecting area of the corresponding pressure tube.

Pressure difference sensor for providing a pressure measurement signal

The pressure sensor of the invention includes at least one platform, at least one measuring membrane, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bedhas a glass layer, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membranein the case of overload, characterized in that the contour of the membrane bedis obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate.

Pressure sensor, especially pressure difference sensor

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

Capacitive pressure sensor and method for its production

A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel. The mating body electrode is formed by an inner region of the metallic coating, which inner region is annularly enclosed by an outer region of the coating and is separated from the latter by an annular insulation region.

Differential pressure sensor

Growing community of inventors

Potsdam, Germany

Timo Kober