Flusso Limited

Tim Butler

Florin Udrea

Syed Zeeshan Ali

Christopher James Rosser

Andrea De Luca

Ethan Gardner

Cerdin Lee

We disclose herein a flow sensor comprising: a first substrate comprising an etched portion, a dielectric region located on a first side of the first substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the first substrate, a sensing element located on or within the dielectric membrane, and a second substrate adjoining a second side of the first substrate. The first side of the first substrate and the second side of the first substrate are opposite sides. The first substrate and the second substrate cooperate to form a sensing channel through the flow sensor.

Flow sensor

We disclose herein a flow sensor assembly comprising a first substrate, a flow sensor located over the first substrate, a lid located over the flow sensor, a flow inlet channel, and a flow outlet channel. A surface of the flow sensor and a surface of the lid cooperate to form a flow sensing channel between the flow inlet channel and the flow outlet channel, and a surface of the flow sensing channel is substantially flat throughout the length of the flow sensing channel.

Sensor assembly

Growing community of inventors

Cambridge, United Kingdom

Tim Butler