Qimonda Ag

Namlab Ggmbh

Tim Boescke

Uwe Schroeder

Johannes Heitmann

Annette Saenger

Stephan Kudelka

Stefan Jakschik

Tobias Mono

Elke Erben

Joerg Schumann

Lars Oberbeck

The present invention refers to an electrode comprising a first metallic layer and a compound comprising at least one of a nitride, oxide, and oxynitride of a second metallic material.

Electrode of an integrated circuit

A method for manufacturing an integrated circuit including a ferroelectric memory cell is disclosed. One embodiment of the method includes: forming a amorphous oxide layer over a carrier, the amorphous layer including: O and any of the group of: Hf, Zr and (Hf,Zr), forming a covering layer on the amorphous layer, and heating the amorphous layer up to a temperature above its crystallization temperature to at least partly alter its crystal state from amorphous to crystalline, resulting in a crystallized oxide layer.

Integrated circuit including a ferroelectric memory cell and method of manufacturing the same

Embodiments of the invention provide methods for making an integrated circuit comprising providing a substrate, forming a structured layer stack on the substrate comprising a dielectric layer located on the substrate and an oxide-free metallic layer located on the dielectric layer, wherein the metallic layer comprising a transition metal. The method further comprises oxidizing the metallic layer, thereby increasing a work function of the metallic layer. Moreover, a substrate for making an integrated circuit is described.

Method of making transistor gates with controlled work function

An integrated circuit including a dielectric layer and a method for manufacturing. One embodiment provides a substrate having a first side and a second side and at least one dielectric layer. The dielectric layer includes a zirconium oxide and at least one dopant selected from the group consisting of hafnium and titanium and having a first side and a second side. The first side of the dielectric layer is arranged at least on a subarea of the first side of the semiconductor substrate.

Integrated circuit including a dielectric layer

A capacitor structure comprises a first and a second electrode of conducting material. Between the first and second electrodes, an atomic layer deposited dielectric film is disposed, which comprises zirconium oxide and a dopant oxide. Herein, the dopant comprises an ionic radius that differs by more than 24 pm from an ionic radius of zirconium, while the dielectric film comprises a dopant content of 10 atomic percent or less of the dielectric film material excluding oxygen. A process for fabricating a capacitor comprises a step of forming a bottom electrode of the capacitor. On the bottom electrode, a dielectric film comprising zirconium oxide is deposited, and a step for introducing a dopant oxide into the dielectric film performed. On the dielectric structure, a top electrode is formed. The dopant comprises an ionic radius that differs by more than 24 pm from an ionic radius of zirconium, whereas the dielectric structure deposited comprises a dopant content of 10 atomic percent or less of the deposited material excluding oxygen.

Zirconium oxide based capacitor and process to manufacture the same

A method of fabricating an integrated circuit with a dielectric layer on a substrate is disclosed. One embodiment provides forming the dielectric layer in an amorphous state on the substrate, the dielectric layer having a crystallization temperature; a doping the dielectric layer; a forming of a covering layer on the dielectric layer at a temperature being equal to or below the crystallization temperature; and a heating of the dielectric layer to a temperature being equal to or greater than the crystallization temperature.

Integrated circuit with dielectric layer

The present invention relates to a method for depositing a dielectric material comprising a transition metal compound. After providing a substrate, a first pre-cursor comprising a transition metal compound and a second pre-cursor predominantly comprising at least one of water vapour, ammonia and hydrazine are successively applied on the substrate for forming a first layer of transition metal containing material. In a next step the first pre-cursor and a third pre-cursor comprising at least one of ozone and oxygen are successively applied on the first layer for forming a second layer of the transition metal containing material.

Growing community of inventors

Dresden, Germany

Tim Boescke