Asml Netherlands B.v.

Tien Nang Pham

Jan Bernard Plechelmus Van Schoot

Markus Franciscus Antonius Eurlings

Antonius Johannes Josephus Van Dijsseldonk

Oscar Franciscus Jozephus Noordman

Niek Antonius Jacobus Maria Kleemans

Kevin Weimin Zhang

Ramon Mark Hofstra

Jiun-Cheng Wang

A faceted reflector (&#x2033;) for receiving an incident radiation beam () and directing a reflected radiation beam at a target. The faceted reflector comprises a plurality of facets, each of the plurality of facets comprising a reflective surface. The reflective surfaces of each of a first subset of the plurality of facets define respective parts of a first continuous surface and are arranged to reflect respective first portions of the incident radiation beam in a first direction to provide a first portion of the reflected radiation beam. The reflective surfaces of each of a second subset of the plurality of facets define respective parts of a second continuous surface and are arranged to reflect respective second portions of the incident radiation beam in a second direction to provide a second portion of the reflected radiation beam.

Radiation source

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San Diego, CA, United States of America

Tien Nang Pham