Semilab Semiconductor Physics Laboratory Co., Ltd.

Thye Chong Loy

Jacek J Lagowski

Dmitriy Marinskiy

Shyh-Shin Ferng

Sung-Li Wang

Yi-Hung Lin

Lin-Jung Wu

Sheng-Shin Lin

An example semiconductor wafer includes a semiconductor layer, a dielectric layer disposed on the semiconductor layer, and a layer of the metal disposed on the dielectric layer. An example method of determining an effective work function of a metal on the semiconductor wafer includes determining a surface barrier voltage of the semiconductor wafer, and determining a metal effective work function of the semiconductor wafer based, at least in part, on the surface barrier voltage.

Non-contact method to monitor and quantify effective work function of metals

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Chubei, Taiwan

Thye Chong Loy