Carl Zeiss Smt Gmbh

Other

Carl-zeiss-smt Ag

Thure Boehm

Harry Bauer

Rolf Freimann

Michael Gerhard

Burkhard Speit

Eric Eva

Guido Limbach

Norman Baer

Ralf Kuschnereit

Peter Vogt

Gero Wittich

Ewald Moersen

Michael Thier

Hexin Wang

Joerg Kandler

Frank Richter

Bernhard Wergl

Dietrich Klaassen

J&uuml;rgen Hartmaier

Jens Spanuth

Hans-Josef Paus

A mirror (') with a substrate (S) and a layer arrangement configured such that light () having a wavelength below 250 nm and incident on the mirror at at least an angle of incidence of between 0&#xb0; and 30&#xb0; is reflected with more than 20% of its intensity. The layer arrangement has at least one surface layer system (P&#x2032;&#x2033;) having a periodic sequence of at least two periods (P) of individual layers, wherein the periods (P) include a high refractive index layer (H&#x2032;&#x2033;) and a low refractive index layer (L&#x2032;&#x2033;). The layer arrangement has at least one graphene layer. Use of graphene (G, SPL, B) on optical elements reduces surface roughness to below 0.1 nm rms HSFR and/or protects the EUV element against a radiation-induced volume change of more than 1%. Graphene is also employed as a barrier layer to prevent layer interdiffusion.

Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective

A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method.

Repair method for optical elements having a coating and corresponding optical elements

A method of making a fracture-resistant large-size calcium fluoride single crystal is described, which is suitable for an optical component for radiation in the far UV range. The calcium fluoride raw material for the single crystal is first melted and subsequently solidified by cooling the melt to form a single crystal. However the calcium fluoride raw material is doped with from 1 to 250, preferably 1 to 100, ppm of strontium, preferably added as strontium fluoride, and contains from 1 to 10 ppm of sodium as well as up to 100 ppm of other impurities.

Method of making a fracture-resistant calcium fluoride single crystal and its use

A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF , while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.

Holding device for an optical element made of a crystalline material

Growing community of inventors

Aalen, Germany

Thure Boehm