Other

Applied Materials, Inc.

Technical University of Darmstadt

Thorsten Meiss

Thorsten Alexander Kern

Roland Werthschützky

Stephanie Sindlinger

Alexander Sendobry

Henning Aust

Tim Rossner

Thorsten Kern

Stephanie Klages

An apparatus for contactless transportation of a carrier is provided. The apparatus includes the carrier, being a substrate carrier or a mask carrier. The apparatus includes a linear reluctance motor for providing both a contactless levitation and a contactless drive of the carrier. The linear reluctance motor includes one or more linear stators defining a transportation track for the carrier. The linear reluctance motor includes a mover attached to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. The one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material. The apparatus includes a controller connected to the set of electromagnets.

Apparatus and method for contactless transportation of a carrier

A magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber, including a base defining a transportation track, a carrier movable above the base along the transportation track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit arranged at the base and a second magnet unit arranged at the carrier. The magnetic levitation system further includes a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, wherein at least one of the first magnet unit and the first stabilization magnet unit is arranged in a housing space of the base, the housing space being separated from an inner volume of the vacuum chamber by a separation wall.

Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber

The invention allows for the contacting of preferably microcomponents using electrical wires. By growing metallic microdepositions on cut surfaces of microcables, a contact region is generated which simplifies the dosing and application of a contact auxiliary and allows ultrasonic bonding, comprising a defined size of the electrically conductive area and allowing the contacting of very stably insulated wires. The application of this method in a panelized manner and in series is inexpensive.

Method for the miniaturizable contacting of insulated wires

The invention makes it possible to determine a force vector that is applied to a tip of a minimally invasive surgical instrument. The force acts upon the housing, is directed to the base, and causes a deformation there in special beam structures. Said deformation is detected by tension-sensitive/extension-sensitive resistors whose changes are a measure for the applied force vector. The inventive measuring element comprises special mounting elements so as to be integrated into tube-type instruments such as guiding wires, fastening zones for additional components, an overload protection, and a head shape that is adapted to the treatment process.

Force sensor for the detection of a force vector

A force sensor for detecting at least a force acting in a longitudinal direction of a catheter or guide wire, the force sensor comprising a force pick-up for detecting the force, wherein the force pick-up comprises: a base body with an end face, wherein the base body includes at least one cutout, wherein the cutout causes an asymmetry of the base body relative to the longitudinal direction of the catheter or guide wire upon flexing of the base body upon force Floading thereon from an axial direction, wherein the end face includes a surface area that is substantially greater than the cross-sectional area of the base body in the region of the cutout, but not substantially smaller than the cross-section of the rest of the base body. A method for using this force sensor is also disclosed.

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Darmstadt, Germany

Thorsten Meiss