Robert Boschgmbh

Thorsten Balslink

Burkhard Kuhlmann

Rolf Scheben

Benjamin Schmidt

Mirko Hattass

Daniel Christoph Meisel

Robert Maul

Joerg Muchow

Stefan Mark

Johannes Classen

Frank Schatz

Helmut Grutzeck

Torsten Ohms

Matthias Kuehnel

Andreas Lassl

Nils Felix Kuhlmann

Christian Hoeppner

Wolfram Geiger

Ralf Ameling

Carsten Geckeler

Steffen Markisch

Stefan Pinter

Jens Frey

Joerg Hauer

Udo-Martin Gomez

Hans-Jochen Schwarz

Rainer Straub

Andreas Schmidt

Jan Sparbert

Siegwart Bogatscher

Stephen Schmitt

Hendrik Specht

Robert Sattler

Markus Heitz

Rudolf Ritter

Martin Wrede

Ulrike Schloeder

Daniel Maier

Corinna Koepernik

Manuel Dietrich

David Csima

A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.

Micromechanical component for a rotation rate sensor and corresponding manufacturing method

A delta-sigma modulator which receives an input signal. The input signal is combined with a feedback signal and the combined signal is filtered by the delta-sigma modulator. The filtered signal is quantized, wherein the feedback signal is generated on the basis of the quantized signal. The quantized signal is output as an output signal. The input signal and/or the filtered signal and/or the feedback signal are filtered in such a way that at least one frequency in an out-of-band frequency range of the input signal is amplified in order to suppress out-of-band quantization noise at the at least one frequency.

Delta-sigma modulator, delta-sigma digital-analog converter, and method for operating a delta-sigma modulator and a delta-sigma digital-analog converter

A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.

Micromechanical component for a yaw rate sensor and corresponding production method

A scanning device includes a transmitter, a receiver, and a rotor that is configured to be mounted in a rotatable manner about an axis of rotation. The transmitter is configured to at least occasionally emit electromagnetic radiation, and the receiver is configured to sense at least part of the electromagnetic radiation reflected and/or scattered by an object. The transmitter and the receiver are arranged on the rotor in an at least partially axially overlapping manner based on the axis of rotation.

Scanning device

A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.

Micromechanical component and method for producing a micromechanical component

A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

Rotational speed sensor with minimized interference movements in the driving mode

A rotation rate sensor includes first, second, third and fourth structures that are each movable relative to a substrate, a drive device configured to deflect each of the first, second, third, and fourth structures essentially parallel to a drive direction and out of respective resting positions of the first, second, third, and fourth structures, such that, at a first frequency, the first and fourth structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the second and third structures, and, at a second frequency, the first and second structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the third and fourth structures.

Rotation rate sensor with multiple evaluation during operation at several frequencies

A micromechanical constituent includes an actuator designed to impart to a displaceable element a first displacement motion around a first rotation axis and a second displacement motion around a second rotation axis oriented tiltedly with respect to the first rotation axis, the actuator including a permanent magnet on a first spring element and a one second permanent magnet on a second spring element, where the first permanent magnet is excitable to perform a first translational motion tiltedly with respect to the first rotation axis and tiltedly with respect to the second rotation axis, and the second permanent magnet is excitable to perform a second translational motion directed oppositely to the first translational motion, causing the second displacement motion of the displaceable element around the second rotation axis.

Micromechanical constituent and method for adjusting an adjustable element

A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

Dual-axis ultra-robust rotation rate sensor for automotive applications

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

A method is described for determining angle errors when measuring slewing angles of a pivoted light-deflecting device, including the following steps: emitting a first light beam and a second light beam, which enclose a light beam angle, onto the light-deflecting device; receiving the first light beam and second light beam deflected by the light-deflecting device and reflected by an object; calculating a first propagation path of the first light beam and a second propagation path of the second light beam; pivoting the light-deflecting device from an initial position to a final position, respective slewing angles of the light-deflecting device being measured in the process and a dependency of the first propagation path on the measured slewing angles being determined; and calculating an angle error for a measured slewing angle to be corrected from the set of measured slewing angles by using the light beam angle, the second propagation path and the dependency of the first propagation path on the measured slewing angle.

Method for determining angle errors and light-emitting device

A multiaxial rotation rate sensor for detecting rotation rates on three mutually perpendicular rotation axes.

Multiaxial rotation rate sensor including a split central rotor

A sensor () for measuring a variable generates a sensor signal (S), oscillates at a drive frequency (f), and includes: a rate demodulator (), which demodulates the sensor signal (S) by multiplying it by a first demodulation signal, in order to generate a rate signal (R), which contains information about the measured variable to be measured; a quadrature demodulator (), which demodulates the sensor signal (S) by multiplying it by a second demodulation signal shifted by 90&#xb0; with respect to the first demodulation signal, to generate a quadrature signal (Q); and an analysis circuit (), which determines whether the quadrature signal (Q) or a signal (Q) derived therefrom is subject to a periodic oscillation and, if a periodic oscillation is present, outputs a status signal (X) having a value which indicates that the instantaneous rate signal (R) is influenced by an external interference acting on the sensor ().

Sensor and method for operating a sensor

A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations.

Rotation rate sensor and a method for operating a rotation rate sensor

A rotation-rate sensor having a substrate with main extension plane, for detecting a rotation rate, extending in a direction parallel/orthogonal to the main plane; the sensor including a primary/secondary pair of seismic masses; the primary pair having first/second primary masses; the secondary pair having first/second secondary masses; the first/second primary masses being movable relative to the substrate along a primary deflection direction extending parallel to the main plane; the first/second secondary masses being movable relative to the substrate along a secondary deflection direction extending parallel to the main plane; the first/second primary masses and the first/second primary masses being movable antiparallel or parallel to one another corresponding to the deflection direction, essentially extending orthogonally to the secondary deflection direction; and the primary pair and/or secondary pair being drivable so that, based on sensor rotation, the Coriolis force leads to deflection of the first/second primary masses and/or the first/second secondary masses.

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