Wacker-chemitronic Gesellschaft Fur Elektronik-grundstoffe Mbh

Thorgard Zainer

Franz Koppl

Winfried Lang

Johann Braunsperger

A process for working up hydrolyzable and/or water-soluble compounds by ping them in water is provided wherein the compounds are fed into the funnel of a rotating cone of water running down into the tip of the cone, with the water being constantly renewed by a supply at the base of the cone. The process is particularly useful for working up mixtures containing silanes and/or chlorosilanes in silicon deposition plants.

Process for working up hydrolyzable and/or water-soluble compounds

Trichlorosilane or silicon tetrachloride is prepared by reacting metallic uminum-containing silicon in a reaction zone with hydrogen chloride or chlorine at a temperature between about 260.degree. and about 1200.degree. C, the reaction gas is then cooled to 40.degree. to 130.degree. in a cooling zone through which the velocity of flow is maintained at between 3 and 30 meters per second, and finally filtered.

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Burghausen, Germany

Thorgard Zainer