Preh Gmbh

Thomas Zirkelbach

Thilo Schultheis

Benedikt Schmidt

Jürgen Nauth

Harald Ment

Sara Hofmann

Matthias Müller

The present disclosure relates to a capacitive force sensor. The capacitive force sensor includes a planar base body, a supported membrane body, two spacers disposed spaced apart to each other, where the membrane body abuts the planar base body via the spacers, and wherein a cavity is formed between the membrane body and the planar base body to allow displacement or deflection of the membrane body under a force onto the membrane body in the area between the spacers. The membrane body forms a first electrode and, a second electrode is provided on the planar base body, wherein the first and second electrode define a first precision capacitor with changing measuring capacity depending on the force. An electrical bracket extends from each of the spacers for electrically contacting the first electrode and forms a bend between each of the associated spacer and a bottom of the base body.

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Bad Neustadt, Germany

Thomas Zirkelbach