Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. International Business Machines Corporation (1 from 164,108 patents)
2. Siemens Aktiengesellschaft (1 from 30,028 patents)
1 patent:
1. 5899706 - Method of reducing loading variation during etch processing