Applied Materials, Inc.

Thomas Werner Zilbauer

Ignaz Eisele

Ursula Ingeborg Schmidt

Jürgen Grillmayer

Jan Matusche

A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes: depositing a first transparent layer stack over a transparent substrate, wherein said first transparent layer stack includes at least a first dielectric film with a first refractive index, and a second dielectric film with a second refractive index different from the first refractive index, providing a structured transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order, and wherein the structured transparent conductive film has a sheet resistance of 100 Ohm/square or below, and depositing a second transparent layer stack over the transparent conductive film, wherein said second transparent layer stack includes at least a third dielectric film with a third refractive index, and a fourth dielectric film or a transparent adhesive with a fourth refractive index, wherein the first transparent layer stack, the structured transparent conductive film and the second transparent layer stack are provided in this order.

Transparent body for use in a touch panel having structured transparent conductive film directly between first and second transparent layer stacks, method of making, and apparatus for making

A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes depositing a first transparent layer stack over a first side of a transparent substrate, wherein said first transparent layer stack is selected from the group consisting of: a layer stack, wherein the layer stack includes a first dielectric film with a gradient refractive index from a first refractive index to a second refractive index, and a layer stack, wherein the layer stack includes at least a first dielectric film with a first refractive index and a second dielectric film with a second refractive index different from the first refractive index. The process further includes providing a structured transparent conductive film over the first side of the substrate, and depositing at least one first layer over a second side of the substrate wherein the second side opposes the first side, and wherein the at least one first layer is selected from the group consisting of: an anti-reflection layer and an anti-fingerprint layer.

Transparent body with single substrate and anti-reflection and/or anti-fingerprint coating at an opposite side of the substrate from a structured transparent conductive film, and method of manufacturing thereof

A method and apparatus for performing ALD deposition of hafnium oxide on a substrate is provided. The apparatus includes a process chamber, a precursor delivery subsystem, an oxidizer delivery subsystem, a purge gas subsystem, a solvent flush subsystem, and optional solvent recovery and purification subsystems. The method includes pulsing precursor compounds into the process chamber in sequence. While one precursor is pulsed, purge gas is provided through the other precursor line. After pulsing, precursor lines are purged, and the chamber is evacuated and purged. A solvent flush step is employed to remove precursor deposits that build up in piping over time.

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Alzenau, Germany

Thomas Werner Zilbauer