Speedfam-ipec Corporation

Thomas Waddle

Eric C Shurtliff

Karl Kasprzyk

A workpiece cleaning element incorporates an injection molded resin core having integral spacers formed at a central portion of the resin core. The resin core is formed from a suitable material that does not leech chemicals or become brittle in the presence of cleaning fluids. A substantially resilient cleaning material located on the resin core includes a plurality of raised ribs that perform contact scrubbing of the workpiece. Each rib includes a longitudinal channel formed therein that divides the rib into a leading cleaner surface and a trailing cleaner surface. The ribs are arranged on the cleaning element in a pattern that promotes effective removal of debris from an inner position on the workpiece to the outer edge of the workpiece.

Workpiece cleaning element with improved rib configuration

A plate stabilizing apparatus is provided which comprises a lateral support structure conflgured to adjust plate alignment which engages vertical rails secured to a polishing machine housing. thus effectively stabilizing the polishing plate while allowing vertical movement of the plate assembly. In a preferred embodiment, a plate stabilizing apparatus includes an alignment plate secured to a subcylinder close to and axially aligned with the polishing plate universal joint. Adjustment screws are provided for lateral adjustment of the polishing plate which is secured to a substantially rigid lateral support structure. The lateral support structure rides within vertical rails secured to the inner housing walls of the polishing apparatus thus allowing vertical movement of the polishing plate during operation.

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Avondale, AZ, United States of America

Thomas Waddle