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Endress+hauser Gmbh+co.

Endress + Hauser Gmbh & Co. Kg

Thomas Velten

Frank Hegner

Elke Maria Schmidt

Andreas Rossberg

Ulfert Drewes

Dietfried Burczyk

Karl Fl&ouml;gel

Wolfgang Woest

J&uuml;rgen Breme

Tanja St&ouml;cklin

A relative pressure measuring instrument has a reference pressure feed that offers a high measure of safety and is easy to produce. Included is a relative pressure measuring cell having a pressure sensitive element, on whose process-facing side there is present during operation a pressure (p) to be measured, on whose process-averted side there is present during operation a reference pressure (p ) to which the pressure (p) to be measured is to be referred, a support on which the relative pressure measuring cell is arranged and which is enclosed in a housing, a process connection, that is connected to a process-facing end of the housing, a measuring instrument housing that is arranged at a process-averted end of the housing, and a reference pressure feed through which during operation the reference pressure (p ) is led to the process-averted side of the pressure sensitive element, and which leads completely out of the relative pressure measuring instrument laterally through the support and a single bore through the housing.

Relative pressure measuring instrument

A pressure sensor element for mounting in a connecting element comprises an isolator body with a laterally projecting membrane. The laterally projecting membrane covering an opening of a passage through which the pressure present at the surface of the membrane is conveyed to a pressure transducer element by means of a hydraulic fluid. In order to mount the pressure sensor element, it is secured in a mounting aperture of the connecting element. The projecting perimeter of the membrane is secured to the surface surrounding the mounting aperture of the connecting element by means of a continuous seam. A membrane type ring in combination with a conventional membrane may be substituted for the projecting membrane, wherein the membrane type ring covers the gap between the pressure sensor element and the adapter element.

Pressure sensor, and a method for mounting it

A diaphragm and basic body of a pressure sensor are interconnected via a joint F. A groove is provided in the basic body in order to reduce the stress concentration in the region of the joint F.

Capacitive pressure sensor

The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor ( ) has a substrate ( ) and a first major surface ( ), a second major surface ( ) and a circumferential surface ( . A plate-shaped electrode ( ) of electrically conductive material is secured in a recess ( ) in the major surface ( ) in a high-pressure-resistant and high-vacuum-tight manner by a joining material ( ). A through connection ( ) is provided from the electrode ( ) through the substrate ( ) to the major surface ( ) or the circumferential surface ( ). A diaphragm ( ) of ceramic, glass, or single-crystal material is attached to the substrate ( ) outside the recess ( ) along a joint ( ) by a joining material ( ), and forms itself a further electrode or is covered, on a surface facing the electrode ( ), with a further electrode ( ) which is contacted through the joint ( ). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.

Capacitive pressure sensor or capacitive differential pressure sensor

These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (,) having a cylindrical surface (,), a major surfaces (,). The major surface (,) includes a concave central area (,) merging, in the direction of and up to said cylindrical surface (,), into a convex surface (,) having a vertex line (,) and forming a planar ring surface (,) in its area. An electrode (,) is located in the concave area (,). An electrical connection (,) extends from electrode (,) through the substrate (,) to surface (,). A ceramic diaphragm (,) has a planar inner surface (,) on which an electrode (,) is located and which rests on the ring surface (,) of the substrate (,). The diaphragm (,) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (,) in the area of the substrate between the ring surface (,) and the cylindrical surface (,). An electrical connection to the electrode (,) is made through the wedge zone (,). Respective differential pressure sensors can comprise a central substrate (,) and two outer diaphragms (,) or a central diaphragm (,) and two outer substrates (,).

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Wehr, Germany

Thomas Velten