Sensirion Ag

Thomas Uehlinger

Lukas Bürgi

Werner Hunziker

Martin Winger

Nicolas Daix

Christophe Salzmann

Nicolas Zäch

Sebastian Raab

Lukas BÜRGI

A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a component in a gas comprises a measurement cell enclosing a measurement volume and a gas permeable area in the measurement cell for a gas to enter the measurement volume. An electromagnetic radiation source is arranged to emit electromagnetic radiation into the measurement volume, and a pressure transducer is arranged to measure a sound wave generated by the component in response to an absorption of electromagnetic radiation by the component in the measurement volume. In one aspect, the gas permeable area is represented by a porous gas permeable membrane with an average pore size of the porous gas permeable membrane between 10 nm and 1 μm. In another aspect the gas permeable area is represented by an area of the measurement cell containing holes reaching through an otherwise gas tight material of the measurement cell, with a diameter of the holes between 100 nm and 10 μm.

Photoacoustic gas sensor device

A photoacoustic gas sensor device is proposed for determining a value indicative of a presence or a concentration of a component in a gas. The photoacoustic gas sensor device comprises a substrate, and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell enclosing a measurement volume. The measurement cell comprises an aperture for a gas to enter the measurement volume. The device further comprises an electromagnetic radiation source for emitting electromagnetic radiation, and a microphone for measuring a sound wave generated by the component in response to an absorption of electromagnetic radiation by the component. The electromagnetic radiation source and the microphone are arranged on the first side of the substrate and in the measurement volume. The microphone has a bottom port facing the substrate, and the measurement volume is communicatively coupled to the bottom port.

An infrared device comprises a substrate. A configuration for emitting infrared radiation is supported by the substrate. The configuration comprises an electrically conducting layer arrangement of less than 50 nm thickness between dielectric layers. In addition, a heater arranged for heating the configuration to emit the infrared radiation is supported by the substrate.

Infrared device

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Stäfa, Switzerland

Thomas Uehlinger