Aehr Test Systems, Inc.

Aeha Test Systems

Thomas T Maenner

Jovan Jovanovic

Donald Paul Richmond, Ii

Scott E Lindsey

Kenneth W Deboe

Frank Otto Uher

Long V Vu

Mark Charles Carbone

Patrick M Shepherd

James F Tomic

Paul W Burke

Jeffrey L Tyson

Doan D Cao

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

Apparatus for testing electronic devices

The invention provides an apparatus for testing an integrated circuits on devices including a plurality of electrical subassemblies including a plurality of pattern generator, driver, and power boards divided into physical zones with each physical zone including one pattern generator board, at least one driver board, and at least one power board connected to one another; and a configuration file having information representing flow of current through the electrical subassemblies connected to one another in an interconnection scheme, wherein the electrical subassemblies are organized into at least one logical zone, and wherein the logical zone comprises a plurality of pattern generators.

Growing community of inventors

San Ramon, CA, United States of America

Thomas T Maenner