Carl-zeiss-smt Ag

Carl Zeiss Smt Gmbh

Jenoptik Laser, Optik, Systeme Gmbh

Jenoptik Optical Systems Gmbh

Thomas Schletterer

Jens Kugler

Franz Sorg

Andreas Wurmbrand

Thomas Ittner

Bernhard Gellrich

Dirk Schaffer

Guido Limbach

Julian Kaller

Marco Bornschein

Dieter Schmerek

Manfred Steinbach

Hans-Juergen Scherle

Detlev Mueller

Andre Hillner

A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.

Replacement apparatus for an optical element

The invention relates to an optical mounting comprising a stationary outer mounting and an inner mounting part embodied to receive an optical element. The aim of the invention is to enlarge the adjustment path in the direction of the optical axis of the optical element that is to be mounted, and as a result, obtaining high stability and rigidity that is perpendicular to the optical axis. Also, the invention aims at keeping the space requirements and the manufacturing and mounting costs as low as possible.

Optical mounting and optical component comprising said type of optical mounting

In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements.

Precision mechanical-optical system and method for producing a composite from optical elements held individually in mounts

An optical element unit is provided comprising an optical element group; a housing receiving said optical element group and having an inner housing part and an exit end; and a purge unit connected to said housing and providing a purge medium to said inner housing part. The optical element group comprises an ultimate optical element. The ultimate optical element is located at the exit end of housing and separates the inner housing part from an environment external to the housing. The ultimate optical element and the housing define a sealing gap. The purge unit provides purge medium to the sealing gap to prevent intrusion of contaminants into the inner housing part.

Optical element unit for exposure processes

There is provided an optical element. The optical element includes an element body having an optically effective region that has an optical axis and a peripheral region extending in a circumferential direction of the element body, a holding region disposed in the peripheral region, and a contact region in the holding region. The holding region co-operates with a holding device to hold the element body. The contact region is configured with a first contact surface and a second contact surface that are (a) spaced apart from one another in a direction of the optical axis, (b) both inclined with respect to the optical axis; and (c) not parallel to one another.

Optical element

Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element () having a first axis () and a holding device () that fixes the closing element () at least in the direction of the first axis (), the holding device () being configured for radial clamping of the closing element ().

Closing module for an optical arrangement

In a low-deformation support device of an optical element (), in particular an end plate () of a projection objective () of a projection exposure machine () for microlithography for the purpose of producing semiconductor components, in a mount (), the optical element () is connected to the mount () at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential wails of mount () and optical element (). The mount () is provided with at least three bearing elements () which are distributed over the circumference and by means of which the optical element () is laterally and axially supported. The mount () has spring elements () which are constructed monolithically with the bearing elements () and are soft in axial and radial directions.

Low-deformation support device of an optical element

A radially adjustable lens mounting with a mounting ring, a lens and a large number of leaf spring elements each of which is firmly attached to the mounting ring at one end, the other end being in contact with a ring groove formed by the peripheral surface of the lens. The lens mounting allows a frictionless and tilt-free adjustment of the lens and holds the lens in a manner that is stable over a long time and is independent of thermal and mechanical stresses.

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Stadtroda, Germany

Thomas Schletterer