Government of the United States of America, As Represented by the Secretary of Commerce

University System of Maryland

National Institute of Standards and Technology

Thomas Purdy

Nikolai Nikolaevich Klimov

Stephen Paul Eckel

James Fedchak

Yeghishe Tsaturyan

Pen-Li Yu

Raymond W Simmonds

Tobias K Herman

Nir S Kampel

Robinjeet Singh

Katarina Cicak

Cindy A Regal

A photonic quantum dew point sensor determines a dew point of an analyte and includes a common substrate; a photonic dew sensor on the common substrate and exposed for direct contact with the analyte; a photonic temperature sensor on the common substrate; an optomechanical temperature sensor on the common substrate; a dew sensor substrate interposed between the photonic dew sensor and the common substrate; a heater on the dew sensor substrate proximate to the photonic dew sensor; a temperature sensor substrate interposed between the common substrate and each of the photonic temperature sensor and the optomechanical temperature sensor; and a sensor cover on the photonic temperature sensor, the optomechanical temperature sensor, and the temperature sensor substrate to cover the photonic temperature sensor and the optomechanical temperature sensor to prevent direct contact between the analyte and each of the photonic temperature sensor and the optomechanical temperature sensor.

Photonic quantum dew point sensor

An optomechanical pressure-measurement system measures pressure in the range of 10Pa-10Pa by measuring various properties of a vibrational mode of an ultra-thin membrane member. With independent measurements of the thickness and density of the membrane, in addition to the measured vibration mode properties, the system can operate as a primary pressure sensor. The membrane member is mounted on a vibration-isolated mount and is excited by a drive force. A laser beam impinges on the excited membrane, and an optical phase detector detects the amplitude of the oscillations, as well as parameters of the laser beam affected by the membrane vibration. In one embodiment, a mechanical damping is computed based on the amplitude or frequency shift (depending on the pressure range), and the pressure based on the ring-down time of the membrane vibration mode.

Optomechanical pressure measurement system and method using the vibrational modes of a membrane

A reticulated resonator includes: a reticulated substrate that includes: a substrate frame; and a phononic structure in mechanical communication with the substrate frame and including a plurality of unit members arranged in a two-dimensional array; and a membrane disposed on the reticulated substrate. A process for producing a membrane frequency includes: providing a reticulated resonator including: a substrate frame; a phononic structure including: a first link connected to the substrate frame; a plurality of unit members arranged in a two-dimensional array and connected to the first link and in mechanical communication with the substrate frame through the first link; and a second link connected to the unit members; a membrane frame connected to the second link and in mechanical communication with the unit members through the second link; and a membrane disposed on the membrane and in mechanical communication with the substrate frame through the membrane frame and the unit members; subjecting the membrane to an excitation frequency; receiving, by the membrane, the excitation frequency; and producing, by the membrane, a membrane mode including a membrane frequency in response to receiving the excitation frequency.

Reticulated resonator, process for making and use of same

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Gaithersburg, MD, United States of America

Thomas Purdy