Infineon Technologies Ag

Thomas Pompl

Martin Schrems

Martin Kerber

Helmut Wurzer

Anke Krasemann

The invention relates to an electronic switching circuit in which a plurality of test circuit blocks is provided, whereby every test circuit block comprises a first sub-circuit block and at least one second sub-circuit block. A field effect transistor in the first sub-circuit block has a gate insulation layer that is thicker than the gate insulation layer of a field effect transistor in the second sub-circuit block.

Electronic switching circuit, switching circuit test arrangement and method for determining the operativeness of an electronic switching circuit

A method of fabricating a barrier layer includes oxidizing a silicon-containing substrate to form a substrate oxide layer on the surface of the substrate, producing an oxygen-impervious layer at an interface between the substrate oxide layer and the substrate, and etching the substrate oxide layer until the underlying oxygen-impervious layer is uncovered.

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Landshut, Germany

Thomas Pompl