Texas Instruments Corporation

Thomas Patrick Conroy

Yuanning Chen

Nagarajan Sridhar

Jeffrey R Debord

Duofeng Yue

Jeffrey Loewecke

Jiejie Xu

Jeffrey DeBord

A photovoltaic cell is provided as a composite unit together with elements of an integrated circuit on a common substrate. In a described embodiment, connections are established between a multiple photovoltaic cell portion and a circuitry portion of an integrated structure to enable self-powering of the circuitry portion by the multiple photovoltaic cell portion.

Self-powered integrated circuit with multi-junction photovoltaic cell

Methods () are described for calibrating the implantation angle of an ion implanter utilized in the manufacture of semiconductor products. One method () includes implanting () phosphorous ions into a pilot wafer held by a wafer platen held at a starting implantation angle in the ion implanter. The phosphorous implantation into a p-doped substrate of the pilot or blank wafer, for example, forms a semiconductive sheet. The method () then includes changing the implantation angle (), and implanting another wafer () with phosphorous ions. The angle changing () and implanting () of other wafers continues in this manner until all wafers or angles are implanted () as desired. The phosphorous implanted wafers are then measured () with a four-point probe, for example, to obtain the sheet resistance of all the implanted wafers. The difference between the sheet resistances of the wafers at each corresponding implant angle is then obtained () to determine a functional relationship between the sheet resistance and the implantation angle. Finally, the functional relationship is then used to calibrate () the implantation angle of the implanter. For example, the lowest sheet resistance of the functional relationship may be determined, the relationship normalized to the lowest sheet resistance, then a zero degree implantation angle of the implanter is calibrated to to coincide with the lowest sheet resistance measurement.

Method for implanter angle verification and calibration

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Dallas, TX, United States of America

Thomas Patrick Conroy