Leybold Vakuum Gmbh

Thomas Palten

Dirk Kalisch

Robert Stolle

A friction vacuum pump for use in a system for regulating the pressure in a vacuum chamber includes a multistage turbomolecular vacuum pump section ( ) whose stages each consist of a row of stator vanes and rotor vanes ( or ). The pump regulates the pressure of heavy gases or of a gas mixture containing heavy gases. To this end, the friction vacuum pump ( ) is equipped with a molecular pump section ( ) located on the fore-vacuum side and a space ( ), in which the pump action is interrupted. The space is provided in the transition area from the turbomolecular vacuum pump section ( ) to the molecular pump section ( ) or in the transition area from the molecular flow to viscous flow.

Friction vacuum pump for use in a system for regulating pressure and pressure regulating system comprising a friction vacuum pump of this type

During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply ( ) has its pressure reduced by a pressure reducer ( ). An on/off valve ( ) controls a flow of the inert gas through a flow restriction ( ) which restricts the flow of inert gas to appropriate sealing gas rates at an outlet ( ). After pumping the corrosive gas, a control valve ( ) in a bypass line ( ) causes the inert gas to be supplied to the outlet ( ) at a higher flow rate for purging the pump.

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Kerpen, Germany

Thomas Palten