Corning Incorporated

Thomas P Seward

Nicholas Francis Borrelli

Charlene Marie Smith

Douglas Clippinger Allan

William Robert Powell

Daniel Raymond Sempolinski

The invention relates to optical glass having improved initial transmittance, formed by subjecting the glass to a hydrogen and/or deuterium treatment at a temperature, and for a duration of time sufficient to diffuse the hydrogen and/or deuterium into the glass.

Method of increasing the initial transmittance of optical glass

The invention relates to fused silica having low compaction under high energy irradiation, particularly adaptable for use in photolithography applications.

Method for determining laser-induced compaction in fused silica

A fused silica glass which exhibits low compaction when exposed to high intensity excimer radiation, also exhibits low optical path distortion after exposure to a high intensity radiation dose. Also disclosed is a method for improving the select ratio of fused silica glass for photolithography, by predicting the optical path distortion of the glass under use by determining the intrinsic densification of the glass at a given number of pulses and fluence per pulse. Mathematical modeling methods are also disclosed for use in producing a fused silica stepper lens having low compaction under high intensity excimer radiation; and for determining optical path distortion caused by high energy radiation in fused silica glass.

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Alfred, NY, United States of America

Thomas P Seward