Continental Teves, Ag and Company Ohg

Albert-Ludwigs-Universitat Freiburg

Albert-Ludwigs-University of Freiburg

Thomas Northemann

Yiannos Manoli

Alexander Buhmann

Andreas Kugi

Michael Maurer

Markus Egretzberger

Florian Mair

Lin He

Armin Taschwer

A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u, u, u, u) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u, u, u, u) are adjusted in accordance with a resonance frequency variable (&#x169;, &#x168;), a quadrature variable (&#x169;, &#x168;) and a restoring variable (&#x169;).

Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation

A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.

Measuring device with a micro-electromechanical capacitive sensor

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Freiburg, Germany

Thomas Northemann