Robert Boschgmbh

Thomas Northemann

Fabian Purkl

Thomas Buck

Kerrin Doessel

Daniel Pantel

Ahmad Mansour

A micromechanical sound transducer system includes a substrate that includes (a) a cavity with a cavity edge area, (b) a front side, and (c) a rear side; a piezoelectric vibrating beam that is elastically suspended on the front side and that extends across the cavity; and, for the piezoelectric vibrating beam, a respective deflection limiting device that is on a front edge area of the respective vibrating beam and that is configured to limit a deflection of the respective vibrating beam to a limiting deflection by causing the respective front edge area of the respective vibrating beam to interact with the cavity edge area or an opposing front edge area of another vibrating beam.

Micromechanical sound transducer system and corresponding manufacturing method

Measures for regulating the electrical bias voltage at the measuring capacitor of a MEMS sensor element are described. A base voltage is applied to the measuring capacitor and regulated in such a way that the potential difference between the two electrode sides of the measuring capacitor corresponds to the setpoint voltage. The base voltage is regulated in a low-voltage range.

Growing community of inventors

Gerlingen, Germany

Thomas Northemann