Ruhr-universitat Bochum

Heil, Brian George

Thomas Mussenbrock

Ralf Peter Brinkmann

Brian George Heil

Uwe Czarnetzki

Thomas Musch

Christian Schulz

Martin Lapke

Robert Storch

Peter Awakowicz

Christian Zietz

Ilona Rolfes

Jens Oberrath

Tim Styrnoll

Ralf-Peter Brinkmann

The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.

Method for controlling ion energy in radio frequency plasmas

Growing community of inventors

Wuppertal, Germany

Thomas Mussenbrock