Carl Zeiss Smt Gmbh

Deutsches Zentrum Fur Luft-und Raumfahrt E.v.

Dürr Systems Ag

Thomas Monz

Stefan Xalter

Ulrich Loering

Christoph Zaczek

Julian Kaller

Hans Michael Stiepan

Stefan Nolte

Axel Widenhorn

Roland Stoll

Dominik Lebküchner

Thilo Kissel

Jan Zanger

Timo Zornek

Tobias Ullsperger

Soeren Knorr

Michael Klasna

Cristian Gleason

A method for measuring a surface shape of an optical element, wherein the optical element has a main body with a substrate and a reflective surface, and wherein at least one cooling channel for receiving a coolant is formed in the substrate, comprising: a) recording a cooling channel pressure, b) recording a measurement environment pressure, c) determining a pressure difference based on the cooling channel pressure and the measurement environment pressure, d) comparing the pressure difference with a predetermined target pressure difference, e) monitoring for a deviation between the pressure difference and the target pressure difference, wherein, if a deviation greater than a predetermined limit value is detected, the cooling channel pressure is adapted in such a way that the deviation becomes less than or equal to the predetermined limit value, and f) measuring the surface shape if the deviation is less than or equal to the predetermined limit value.

Production method and measurement method

Burners having a fuel plenum in a base are disclosed. One disclosed example apparatus includes a base of a burner, the base comprising a fuel plenum and coupled to fuel nozzles, where at least one of the fuel nozzles is in fluid communication with the fuel plenum. The disclosed example apparatus also includes a burner head of the burner comprising nozzle passages in fluid communication with an airflow path, where the burner head defines a pilot combustion space that opens towards a flame tube of the burner, and is in fluid communication with the airflow path, and where each nozzle passage is to receive a fuel nozzle to provide fuel to entrain with air from the airflow path.

Burners having fuel plenums

Growing community of inventors

Schlierbach, Germany

Thomas Monz