University System of Maryland

Government of the United States of America, As Represented by the Secretary of Commerce

National Institute of Standards and Technology

Thomas Michels

Vladimir Aksyuk

Kartik Arvind Srinivasan

Ivo Rangelow

Houxun Miao

A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.

Microfabricated optical probe

A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end.

Microscope probe and method for use of same

Growing community of inventors

Dortmund, Germany

Thomas Michels