Omniprobe, Inc.

Texas Instruments Corporation

At&t Intellectual Property I, L.p.

Other

Waviks, Inc.

Thomas M Moore

Lyudmila Zaykova-Feldman

Gonzalo Amador

Rocky Kruger

Matthew Hammer

Gregory A Magel

Cheryl Hartfield

Edward A Walter

Gregory Boyd Shinn

Roger J Stierman

Aaron Smith

Timothy E Bates

Henry Litzmann Edwards

William Hurst

Bryan Patrick Sokolik

Cheryl Diane Hartfield

Bhushan Padhiar

Sung-Jen Fang

John Mark Anthony

Herschel M Marchman

Lyudmilla Zaykova-Feldman

Brian P Miller

Rocky D Kruger

A method includes receiving a request to allocate an instantiation of a network function and information indicative of resource needs of the instantiation. The resource needs include at least one resiliency requirement. The method includes computing a resource map comprising a global tier and a regional tier and comparing the resource needs with the resource map to determine an allocation solution. The method also includes, based on the allocation solution, allocating resources to the instantiation. The resources include a first resource of the global tier and a second resource of the regional tier.

Dynamic hierarchical reserved resource allocation

An optical pyrometer having a coaxial light guide delivers laser radiation through optics to heat a localized area on a sample, and simultaneously collects optical radiation from the sample to perform temperature measurement of the heated area. Inner and outer light guides can comprise the core and inner cladding, respectively, of a double-clad fiber (DCF), or can be formed using a combination of optical fibers in one or more coaxial bundles. Coaxial construction and shared optics facilitate alignment of the centers of the heated and observed areas on the sample. The heated area can be on the order of micrometers when using a single-mode optical fiber core as the inner light guide. The system can be configured to heat small samples within a vacuum system of charged-particle beam microscopes such as electron microscopes. A method for using the invention in a microscope is also provided.

Coaxial fiber optical pyrometer with laser sample heater

Methods and systems for provisioning different services on passive optical networks or forecasting service profiles for passive optical networks. The provisioning may be based on location, guaranteed bandwidth, or the like.

Service bandwidth provisioning on passive optical networks

Apparatus and methods for the alignment of a charged-particle beam with an optical beam within a charged-particle beam microscope, and to the focusing of the optical beam are disclosed. An embodiment includes a charged-particle beam microscope having one or more charged-particle beams, such as an electron beam, and one or more optical beams provided by an optical-beam accessory that is mounted in or on the charged-particle beam microscope. This accessory is integrated into a nanomanipulator system, allowing its focus location to be moved within the microscope. The apparatus includes a two-dimensional pixelated beam locator such as a CCD or CMOS imaging array sensor. The image formed by this sensor can then be used to manually, or automatically in an open or closed loop configuration, adjust the positioning of one or more charged-particle beams or optical beams to achieve coincidence of such beams or focus of one or more such beams.

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

Method for stem sample inspection in a charged particle beam instrument

A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.

Method for processing samples held by a nanomanipulator

A precursor delivery system for an irradiation beam instrument includes an injection tube for injecting gasses into the instrument vacuum chamber and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum.

Apparatus for precursor delivery system for irradiation beam instruments

This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample in a microscope with multiple imaging beams. A scanning electron microscope, a focused ion-beam microscope, or a microscope having both beams, also has an optical microscope. A region of interest on a sample is scanned by both charged-particle and optical beams, either by moving the sample beneath the beams by use of a mechanical stage, or by synchronized scanning of the stationary sample by the imaging beams, or by independently scanning the sample with the imaging beams and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

Method and apparatus for acquiring simultaneous and overlapping optical and charged particle beam images

A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube for injecting gasses into the vacuum chamber of the instrument and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.

Method and apparatus for precursor delivery system for irradiation beam instruments

An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder attached to the instrument tilt stage. The variable-tilt specimen holder includes a first pivoting plate having a slot for holding a specimen rotatably supported in the specimen holder. The first pivoting plate has a range of rotation sufficient to move the axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column of the instrument is greater than zero, to a second position where the axis for thinning of the specimen is substantially parallel to the axis of the ion-beam column. A light detector intercepts light passing through the specimen as it is thinned to determine an endpoint for milling of the specimen.

Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument

A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.

Single-channel optical processing system for energetic-beam microscopes

A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.

Growing community of inventors

Dallas, TX, United States of America

Thomas M Moore