Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Huawei Technologies Co., Limited

Thomas Lisec

Bernd Wagner

Hans-Joachim Quenzer

Fabian Lofink

Bernhard Wagner

Fabian Stoppel

Steffen Chemnitz

Malte Florian Niekiel

Rolf Hagedorn

Ulrich Hofmann

Gunter Fuhr

Hans Joachim Quenzer

Andreas Voigt

Shanshan Gu-Stoppel

Thomas Von Wantoch

Sascha Mühlmann

Tim Reimer

Martin Kreutzer

Sven Grünzig

Christoph Huth

Mato Knez

Florian Niekiel

A MEMS includes a substrate having an element movably suspended relative to the substrate, the element having a first main surface and an opposite second main surface. The MEMS includes a first spring element connected between the substrate and a first column structure connected to the second main surface, and includes a second spring element connected between the substrate and a second column structure connected to the second main surface.

MEMS and method of manufacturing the same

An apparatus includes a substrate having a recess and a multitude of particles arranged in the recess. A first portion of the particles is joined to a porous structure by means of a coating. A second portion of the particles is not joined by means of the coating. The first portion of the particles is arranged closer to an opening of the recess than the second portion of the particles so that a leaking of the second portion of the particles from the recess through the opening is prevented.

Apparatus having a multitude of particles and method for manufacturing the same

A method of producing an oppositely magnetized magnetic structure within or on a substrate material includes: generating first and second numbers of cavities within or on a substrate material and filling the first and second numbers of cavities with first and second hard magnetic materials, respectively exhibiting first and second coercive field strengths, wherein the second coercive field strength is smaller than the first coercive field strength. The method further includes magnetizing, in a first direction, the first and second arrangements of magnetic structures, by a magnetic field having a field strength that exceeds the first and second coercive field strengths. The method further magnetizes the second arrangement of hard magnetic structures in a second direction, which differs from the first direction, by a second magnetic field having a field strength below the first coercive field strength but greater than the second coercive field strength.

Method of producing an oppositely magnetized magnetic structure

A MEMS sound transducer includes a substrate, a membrane formed within the substrate, and a bending actuator applied onto the membrane. The membrane includes at least one integrated permanent magnet and is electrodynamically controllable. The bending actuator can be piezoelectrically controlled separately from the membrane.

MEMS sound transducer

A method for manufacturing a device having a three-dimensional magnetic structure includes applying or introducing magnetic particles onto or into a carrier element. A plurality of at least partly interconnected cavities are formed between the magnetic particles, which contact one another at points of contact, by coating the arrangement of magnetic particles and the carrier. The cavities are penetrated at least partly by the layer generated when coating, resulting in the three-dimensional magnetic structure. A conductor loop arrangement is provided on the carrier or a further carrier. When a current flows through the conductor loop, an inductance of the conductor loop is changed by the three-dimensional magnetic structure, or a force acts on the three-dimensional magnetic structure or the conductor loop by a magnetic field caused by the current flow, or when the position of the three-dimensional magnetic structure is changed, a current flow is induced through the conductor loop.

Method for manufacturing a device having a three-dimensional magnetic structure

A method of producing a device includes providing a substrate which has a recess. A multitude of loose particles is introduced into the recess. A first portion of the particles is coated by using a coating process having a depth of penetration which extends from an opening of the recess, along a direction of depth, and into the recess, so that the first portion is connected to form a solidified porous structure. The depth of penetration of the coating process which extends into the recess is set such that a second portion of the particles is not connected by means of the coating, and such that the solidified first portion of the particles is arranged between the second portion of the particles and surroundings of the recess. According to the invention, the second portion of the particles is at least partly removed from the recess.

Method of producing a cavity having a porous structure

This invention provides a microsystem comprising a porous thermal insulation body composed of particles of low thermal conductivity. The porous body isolates and stabilizes the microsystem.

Thermally insulated microsystem

A device and to a method of producing a device, wherein the method includes, inter alia, providing a substrate and generating at least two mutually spaced-apart cavities within the substrate. In accordance with the invention, each cavity has a depth of at least 50 &#x3bc;m. The cavities are filled up with magnetic particles, wherein the magnetic particles enter into contact with one another at points of contact, and wherein cavities are formed between the points of contact. At least some of the magnetic particles are connected to one another at their points of contact, specifically by coating the magnetic particles, wherein the cavities are at least partly penetrated by the layer produced in the coating process, so that the connected magnetic particles form a magnetic porous structure.

Method of producing a magnetic structure

A converter assembly for converting a primary light into a secondary light includes at least one element which has a light-converting structure with open pores and which is laterally held by a frame. The surfaces of both the light-converting structure as well as of the inner face of the frame are covered with a transparent layer such that each of the afore-mentioned elements forms a region in which a property of the incident light and preferably of the wavelength thereof is changed. In specific embodiments, the converter assembly can be part of display assemblies or of miniaturized components for example. There is also described a method for producing the converter assembly.

Converter for generating a secondary light from a primary light, light-emitting elements which contains such a converter, and method for producing the converter and the light-emitting elements

A micro-electro-mechanical system includes a deflectable actuator plate and an abutment area. An integral piezoelectric functional layer of the deflectable actuator plate is configured across an area Aof the actuator plate. The deflectable actuator plate is configured to effect a hollow warp in at least a controlled or non-controlled state, wherein the abutment area is disposed facing a hollow side of the deflectable actuator plate defined by the hollow warp. The deflectable actuator plate is configured to provide, in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area. In the other state, the deflectable actuator plate is disposed spaced apart from the abutment area.

Micro-electro-mechanical system and method for producing the same

The invention relates to a method for producing a three-dimensional structure. The method according to the invention comprises the following steps: applying to or introducing into a carrier element () particles (), a plurality of at least partially interlinked cavities being formed between the particles () and the particles () coming into contact in points of contact, and interconnecting the particles () in the points of contact by coating the system consisting of particles and the carrier element, the coat () produced during coating penetrating the cavities at least to some extent. The method according to the invention allows the production of three-dimensional structures with little effort.

Method for producing a three-dimensional structure and three-dimensional structure

The present invention relates to a micromechanical HF switching element, in which a freestanding movable element is situated above a metallic surface on a substrate in such way that it is drawn to the metallic surface, to which a dielectric layer is applied, by applying an electrical voltage between the metallic surface and the movable element. The present invention also relates to a method for producing micromechanical HF switching elements of this type, in which the dielectric layer is deposited on the metal surface. The present method is distinguished in that a piezoelectric AlN layer having a columnar, polycrystalline structure and a texture is deposited on the metallic surface as the dielectric layer. Significantly reduced charging of the dielectric material and increased long-term stability of the switching element are achieved by the present method and the HF switching element thus produced.

Micromechanical Hf switching element and method for the production thereof

A device is disclosed for pipetting a liquid, comprising a pipette body enclosing a pipette volume, into which a fluid medium can be placed and in which an actuator that controllably displaces the medium in the pipette volume is provided, as well as a pipette tip, which can be connected to the pipette volume in a fluid-tight manner. The present invention is distinguished by the pipette volume and the pipette tip being connected via a fluid-tight connecting means directly or indirectly to each other in such a manner that the pipette tip is moveable relative to the pipette volume.

Device for pipetting a liquid

A pipette system including a pipette capillary tube and an actuator, with the actuator serving to set the position of a phase boundary between a system medium and a second medium in the pipette capillary is described. A sensor element is also provided for measuring the position of the phase boundary, in such a way that the actuator is controlled by a regulating element in response to an output signal from the sensor element.

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Itzehoe, Germany

Thomas Lisec