Vistec Semiconductor Systems Gmbh

Thomas Krieg

Joachim Wienecke

Wolfgang Vollrath

An apparatus for inspecting a disk-like object comprising at least one first module for inspecting a surface of the disk-like object and at least one second module insertable in the apparatus. The at least one second module is arranged to inspect a different element of the disk-like object than the surface of the disk-like object.

Apparatus for inspecting a disk-like object

Examination devices and methods operating with incident light have hitherto been used for the examination of wafers. To allow these devices also to be used with the transmitted-light method, it is proposed to configure the substrate holder () so that an illumination device () is integrated into the substrate holder () in such a way that transmitted-light illumination of the wafer () is possible.

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Solms, Germany

Thomas Krieg