Scp Global Technologies, Inc.

Thomas Krawzak

Victor B Mimken

Thomas Wayne Ives

Eric T Hansen

William Warren Becia

Randy Mark Hall

A cassette for carrying substantially planar objects. The cassette is formed of only two substantially parallel rods, each rod having spaced apart notches for receiving objects to be carried, together with a pair of end members extending between the rods. The rods and end members are joined to form a substantially rectangular loop.

Process cassette

A multiple stage wet processing platform includes a sealable enclosure, at least two processing modules positioned within the enclosure, at least one of them including a housing having an opening and a door moveable into position covering the opening, at least two processing vessels within the housing, and an intra-module robot within the housing and including a wafer support member, the intra-module robot moveable to a first position in which the support is disposed in a first one of the processing vessels and a second position in which the support is disposed in a second one of the processing vessels. An inter-module robot is positioned within the enclosure and is moveable between a first position adjacent to a first one of the modules and a second position adjacent to a second one of the modules.

Growing community of inventors

Boise, ID, United States of America

Thomas Krawzak