Invensense, Inc.

Thomas Kraehenbuehl

Chung-Hsien Lin

Tsung Lin Tang

Rene Hummel

Stefan Thiele

Wang Shen Su

Johannes Schumm

Andreas Reinhard

Chia Min Lin

René Hummel

Chia Ming Lin

Tsung-Lin Tang

Chia-Min Lin

Wang-Shen Su

A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

Pressure sensor

A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.

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Zurich, Switzerland

Thomas Kraehenbuehl