Carl Zeiss Jena Gmbh

Thomas Koehler

Eckhard Roth

Hannes Scheibe

Christian Schindler

A device and method for the controlled processing of at least one workpiece (), comprising a workpiece carrier () on which at least one workpiece receptacle () is present remote from a rotary shaft (), at least one processing unit () and at least one inspection unit (), which are offset relative to the rotary shaft () by an angular distance (&#x3b2;) from one another, are each arranged so that they can be adjusted and moved in a translational manner radially with respect to the rotary shaft (), so that a processing beam (E) and an inspection beam (P), offset relative to one another by the angular distance (&#x3b2;), describe the same spiral-shaped movement path (S) relative to the workpiece carrier (), and the inspection results derived at an inspection point (P) are used to control process parameters in order to change the effect of the processing beam (E).

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Jena, Germany

Thomas Koehler