Siemens Aktiengesellschaft

Thomas K&ouml;lpin

Martin Vossiek

Thomas Scheiter

Peter-Christian Eccardt

Kurt Niederer

A spacer layer (,) with a cavity (,) etched out therein and a diaphragm (,) arranged thereabove on the spacer layer are located on a silicon substrate (,) with a doped region (,) formed therein, whereby the doped region and the diaphragm are electrically connected via terminal contacts (,) to electronic components (,) that are likewise integrated in the substrate (,). The electronic component are a component part of the operating circuit that can also be used for the drive of the diaphragm and for evaluating the diaphragm oscillations. The integration makes it possible to arrange the micromachined transducer components as array that can be electronically driven as phased array.

Growing community of inventors

Amberg, Germany

Thomas Kölpin

Growing community of inventors

Amberg, Germany

Thomas K&ouml;lpin

Thomas Kölpin