Dr. Johannes Heidenhain Gmbh

Johannes Heidenhain Gmbh

Mercedes-benz Group Ag

Thomas Kaelberer

Wolfgang Holzapfel

Markus Meissner

Ralph Joerger

Joerg Drescher

Bernhard Musch

Erwin Spanner

Tingting Zhang-Xu

Manja Zedler

Fabian Stiebert

An optical position-measuring device for determining a relative position of scales includes a light source, the scales and a detector. The scales are movable relative to each other along measurement directions and disposed in different planes in crossed relation to each other, and each have a graduation having grating regions which are arranged periodically and have different optical properties. At the first scale, the illumination beam is split into sub-beams, the sub-beams subsequently impinge on the second scale and are reflected back toward the first scale, and the reflected-back sub-beams strike the first scale again, where they are recombined, so that a resulting signal beam subsequently propagates toward the detector. The measuring graduation of one or more of the scales is configured as a two-dimensional cross grating which has a filtering effect that suppresses disturbing higher diffraction orders.

Optical position-measuring device for suppressing disturbing higher diffraction orders

An optical position measuring device for recording a relative position of two scales includes the scales. The longitudinal extents of the scales are oriented parallel to a first and second measuring direction. A horizontal plane of movement is spanned by these measuring directions. A light source is configured to emit an illumination beam that is split into at least two sub-beam bundles at the first scale. The sub-beam bundles subsequently impinge on the second scale, which is tilted about the direction of the longitudinal extent thereof relative to the horizontal plane of movement, and are back-reflected to impinge again on the first scale and are recombined there such that a resulting signal beam is subsequently propagated toward a detection unit, via which phase-shifted scanning signals are generatable with respect to a relative movement of the scales along a third perpendicular measuring direction and the first or second measuring direction.

Optical position measuring device

An optical position-measuring device for sensing a relative position of two objects, each object being connected to a grating. The optical position-measuring device is configured such that, at one of the gratings, an illumination beam emitted from a light source is split into two sub-beams which, in respective scanning beam paths following the splitting, experience different polarization-optical effects and recombine at one of the gratings. After the differently polarized sub-beams are recombined, a plurality of phase-shifted, displacement-dependent scanning signals are generatable from a resulting signal beam in a detection unit. No separate polarization-optical components are disposed in the scanning beam paths of the sub-beams between splitting and recombination. At least one of the gratings is configured as a polarization grating configured to produce the different polarization-optical effects and such that diffraction orders with different polarization states are produced at each point of incidence on the polarization grating.

Optical position-measuring device

An X-Y table with a position-measuring device includes a table which is disposed on a support and is movable on the support so that altogether the table is positionable in a plane parallel to an underlying stationary base. Two groups of scanning heads are disposed on the support. For position measurement in two directions, a respective one of the scanning heads directs light through a respective transmissive scale attached along an edge of the table such that a respective reflective scale, which is stationary relative to a processing tool disposed above the table, reflects the light through the respective transmissive scale back to the respective scanning head. In a central position of the table, the two groups are in positional correspondence with the transmissive scales, and, in either of two edge positions of the table, only one of the two groups is in positional correspondence with the transmissive scales.

X-Y table with a position-measuring device

An optical position measuring instrument including a first scale having a first graduation, wherein the first scale is disposed movable in a first measuring direction, and at a first defined position in the first measuring direction, the first scale includes a spatially limited first marking that differs from the first graduation. The optical position measuring instrument further including a second scale having a second graduation, wherein the second scale is disposed movable in a second measuring direction, and at a second defined position, the second scale includes a second reference marking that is usable for generating at least one reference signal at a reference position of the second scale only if the first scale is located in the first defined position.

Optical position measuring instrument

A position-measuring device, as well as a system having such a position-measuring device, is used for determining the position of a first object relative to a second object, the first and the second object being movable relative to one another along at least two measuring directions. The position-measuring device has an optical unit that is linked to one of the two objects and includes at least one light source, a detector system, as well as further optical elements in a defined configuration. In addition, the position-measuring device includes a measuring standard-reflector unit, which is provided on the other object, and has at least two differently formed regions in one track that are optically scannable by the optical unit for position sensing. The different formation of the regions makes switching among the various measuring directions possible during position sensing, and positional signals can be generated by the optical unit relative to the relative movement of the two objects for each measuring direction.

Position-measuring device and system having such a position-measuring device

In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion.

Position-measuring device and system having a plurality of position-measuring devices

An interferometer includes a light source and a beam splitter, via which the beam of rays emitted by the light source is split into a measurement beam and a reference beam. The measurement beam propagates in a measuring arm extending in a first direction between the beam splitter and a measuring reflector. The measuring reflector brings about an offset perpendicular to the direction of incidence between the measurement beam falling on it and the measurement beam reflected back by it. In a reference arm extending in a second direction, the reference beam propagates between the beam splitter and a reference reflector. In addition, the interferometer has a detector system, to which the superposed and recombined measurement beam and reference beam are able to be supplied, and via which a distance-dependent interference signal with respect to the position of the measuring reflector is able to be generated. The measuring reflector in each case includes at least one transmission grating as well as a reflector element.

Interferometer

In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.

System and method for positioning a processing tool in relation to a workpiece

In a system for detecting the position of an object in relation to a reference system, the object is arranged so as to be movable in relation to the reference system along at least two orthogonal first and second main movement axes. To record the position of the object in relation to the reference system, a position measuring device includes at least two two-dimensional measuring standards situated along the first main movement axis, and four scanning units for an optical scanning of these measuring standards. In addition, at least four additional supplementary scanning units are provided, which are situated between the four scanning units along the first main movement axis.

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Schrobenhausen, Germany

Thomas Kaelberer