Miasole Hi-tech Corp.

Beijing Apollo Ding Rong Solar Technology Co., Ltd.

Thomas Heckel

Jason Stephen Corneille

Jia-Jay Bill Liu

James Teixeira

Nicholai Busch

Richard Weinberg

Uriel Rosas Rivera

Hyung Paek

Nicolas Guerrero

Heinrich Von Bunau

A sputter deposition method includes sputtering a first target material onto a web substrate moving through a first process module while heating the substrate, providing the substrate from the first process module to a connection unit containing a roller assembly including a plurality of cylindrical rollers, bending the substrate at an angle of 10&#xb0; to 40&#xb0; around the roller assembly in the connection unit, providing the substrate from the connection unit to a second process module, and sputtering a second target material onto the substrate moving through the second process module while heating the substrate.

Sputter deposition apparatus including roller assembly and method

Techniques and systems are described that enable multiple current source prioritization with overvoltage protection.

Multiple current source prioritization circuit with overvoltage protection

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Mountain View, CA, United States of America

Thomas Heckel