Oasis Tooling, Inc.

Micronic Laser Systems Ab

Thomas Grebinski

David Andrew Chapman

Torbjörn Sandström

Ulric Ljungblad

Eberhard Kurth

Christian Kunath

Ulrike A Dauderstadt

The technology disclosed relates to granular analysis of design data used to prepare chip designs for manufacturing and to identification of similarities and differences among parts of design data files. In particular, it relates to parsing data and organizing into canonical forms, digesting the canonical forms, and comparing digests of design data from different sources, such as designs and libraries of design templates. Organizing the design data into canonical forms generally reduces the sensitivity of data analysis to variations in data that have no functional impact on the design. The details of the granular analysis vary among design languages used to represent aspects of a design. For various design languages, granular analysis includes partitioning design files by header/cell portions, by separate handling of comments, by functionally significant/non-significant data, by whitespace/non-whitespace, and by layer within a unit of design data. The similarities and differences of interest depend on the purpose of the granular analysis. The comparisons are useful in many ways.

Methods and devices for independent evaluation of cell integrity, changes and origin in chip design for production workflow

The present invention includes methods and devices that improve the radiation-resistance of a movable micromechanical optical element. In particular, a radiation-resistant layer is added to a movable micro-mechanical optical element, suitable to reduce the surface and bulk material changes to the element that result from exposure to pulsed laser energy densities less than 100 micro-joules per square centimeter and at wavelengths less than or equal to about 248 nm.

High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices

Growing community of inventors

Alamo, CA, United States of America

Thomas Grebinski