Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Technische Universitaet Dresden

Thomas Grasshoff

Thilo Sandner

Thomas Klose

Holger Conrad

Denis Jung

A micromechanical mirror device has: a plate-shaped mirror having a reflecting surface for reflecting light, the reflecting surface being configured to be planar; a closed frame structure supporting the plate-shaped mirror and completely framing an edge of the plate-shaped mirror; a spring arrangement having at least two spring structures arranged mirror-symmetrically and connecting the closed frame structure to a stationary support structure, the spring arrangement being configured such that the closed frame structure and the plate-shaped mirror can be brought into a resonant vibrational state with respect to the support structure; and a connecting arrangement having at least four connecting spring structures arranged mirror-symmetrically and each connecting the plate-shaped mirror to the closed frame structure; the connecting spring structures being configured to be elastically deformable and arranged such that they deform back and forth in the resonant vibrational state so that the plate-shaped mirror is partially mechanically decoupled from the closed frame structure.

Micromechanical mirror device

A micromechanical mirror arrangement comprising a mirror plate () which forms a translation mirror, which is connected via at least one holding element (), preferably two or more holding elements, to a frame structure () and is movable in translation relative to this frame structure, characterized in that the connection region () of at least one holding element (), preferably of all holding elements, with the mirror plate () is arranged inwardly offset, viewed from the outer margin () of the mirror plate toward to the center () of the mirror plate.

Reduction of the dynamic deformation of translational mirrors using inertial masses

A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.

Micromechanical element and sensor for monitoring a micromechanical element

A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.

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Dresden, Germany

Thomas Grasshoff