Ev Group E. Thallner Gmbh

Ev Group Gmbh

Thomas Glinsner

Friedrich Paul Lindner

Markus Wimplinger

Gerald Kreindl

Thomas Wagenleitner

Harald Zaglmayr

Ronald Holzleitner

Florian Schmid

Erich Thallner

Thomas Plach

Christoph Flotgen

Christoph Flötgen

Thomas Wieser

Peter Fischer

Christian Schon

Christian Schön

Matt Crowder

Johann Bernauer

Evelyn Reisinger

Othmar Luksch

Roman Anzengruber

Alexander Nones

Uwe Kriebisch

Paul Lindner

Friedrich Paul Linder

An apparatus and a method for embossing micro- and/or nanostructures in an embossing material.

Device and method for embossing micro- and/or nanostructures

A method for bonding at least three substrates to form a substrate stack, wherein the substrate stack has at least one lowermost substrate a middle substrate, and an upper substrate. The method includes the following steps: aligning the middle substrate to the lowermost substrate and bonding the middle substrate to the lowermost substrate, then aligning the upper substrate and bonding the upper substrate to the middle substrate, wherein the upper substrate is aligned to the lowermost substrate.

Method for bonding of at least three substrates

A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.

Method and device for plasma treatment of substrates

A method for embossing a structure material on a substrate disposed within a device having side walls, a base plate and a cover that define a working space that is isolated from a surrounding environment. The method includes the steps of: a) moving the substrate using a first calibration means and aligning the substrate with an application means, b) applying the structure material to the substrate, c) moving the substrate using a second calibration means that is located at least partially in the working space wherein the substrate is disposed within the working space and is aligned with an embossing means that is located at least partially in the working space, and d) embossing the structure material on the substrate while the substrate is in the working space using the embossing means, wherein the working space has a defined atmosphere, before and during the step of embossing, without interruption.

Method for embossing of substrates

A device and method for treatment of a substrate treatment surface of a substrate with a fluid by immersion of the substrate treatment surface into the fluid. The device includes:

Device and method for treating substrate surfaces

A nanostructure die with a concavely curved nanostructured die surface for seamless embossing of at least one peripheral ring of a jacket surface of an embossing roll in a step-and-repeat process and an embossing roll for continuous embossing of nanostructures with an embossing layer, which has been applied on a body of revolution, with a jacket surface with at least one peripheral ring which is made seamless at least in the peripheral direction and which is embossed in the step-and-repeat process. Furthermore, the invention relates to a method and a device for producing such an embossing roll for continuous embossing of nanostructures as well as a method for producing such a nanostructure die and a method for producing an embossing substrate.

Nanostructure die, embossing roll, device and method for continuous embossing of nanostructures

The invention relates to a device for embossing of substrates, especially semiconductor substrates or wafers, comprised of:

Device for embossing of substrates

A device for producing individually coded read patterns, especially resonators for use in RFID chips. The device includes a structuring apparatus for producing a basic pattern with at least one group of individual patterns on a carrier substrate, and a processing apparatus for forming at least one individually coded read pattern flat a time with read elements from a subset of a total set of the individual patterns of each group. The invention also relates to a corresponding method and a read structure, produced according to the described method and/or the described device.

Method and device for producing individually coded read patterns

This invention relates to a transport foil/film as well as a transport system for holding and transport of at least one thin flexible substrate and a corresponding method and a use of a flexible transport foil/film for holding and for transport of at least one thin, flexible substrate, the substrates being able to be fixed or being fixed at least temporarily on the transport foil/film and the transport foil/film being drivable by driving means for transport of the substrates.

Transport system for accommodating and transporting flexible substrates

The invention relates to a device for loosening a polymer layer from a surface of a substrate.

Device and method for loosening a polymer layer from a surface of a substrate

A system for transferring a nanostructure from a die to a flat side of a large-area substrate. The system has a substrate holder that receives the substrate on a substrate receiving surface. A structural surface of the die is oriented parallel to and opposite the substrate receiving surface. An adjusting means receives the substrate holder and adjusts the position of the substrate relative to the die in an x-direction, y-direction and a rotational direction. An actuator device includes at least two separately controllable actuators that each independently imposes a force in a direction orthogonal to the substrate receiving surface. A force measuring cell is in each actuator for measuring the force applied on the die or substrate. The forces, in combination, produce a single, controllable resultant force at a predetermined location. The single, resultant force is orientated in a direction orthogonal to the substrate receiving surface of the substrate holder.

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St. Florian am Inn, Austria

Thomas Glinsner