Applied Materials, Inc.

The Coca-Cola Company

Leybold Aktiengesellschaft

Applied Films Gmbh & Co. Kg

Leybold Systems Gmbh

Balzers Und Leybold Deutschland Holding Ag

Applied Materials Gmbh & Co Kg

Thomas Gebele

Helmut Grimm

Elisabeth Budke

Yu Shi

Mark Rule

Jürgen Henrich

Wolfgang Buschbeck

Hyun Chan Park

Stefan Bangert

Andreas Lopp

Uwe Hoffmann

Michael Koenig

Oliver Heimel

Ajay Sampath Bhoolokam

Gert R&ouml;dling

Jürgen Ulrich

Marcel Martini

Manfred Weimann

Jürgen Honekamp

According to one aspect of the present disclosure, a method of coating a substrate () with at least one cathode assembly () having a sputter target () and a magnet assembly () that is rotatable around a rotation axis (A) is provided. The method comprises: Coating of the substrate () while moving the magnet assembly in a reciprocating manner in a first angular sector (); and subsequent coating of the substrate () while moving the magnet assembly () in a reciprocating manner in a second angular sector () different from the first angular sector (). According to a second aspect, a coating apparatus for performing said method is provided.

Method of coating a substrate and coating apparatus for coating a substrate

According to one aspect of the present disclosure, a method of coating a substrate with at least one cathode assembly having a sputter target and a magnet assembly that is rotatable around a rotation axis is provided. The method comprises: Coating of the substrate while moving the magnet assembly in a reciprocating manner in a first angular sector; and subsequent coating of the substrate while moving the magnet assembly in a reciprocating manner in a second angular sector different from the first angular sector. According to a second aspect, a coating apparatus for performing said method is provided.

An electrode arrangement for the plasma-aided coating of a substrate () with a layer of material comprising at least one first and a second material component and for the production of a plasma discharge, more especially an arc discharge (), having an anode arrangement (), which provides the first material component at an anode material surface () for evaporation, and a cathode arrangement (), which provides the second material component at a cathode material surface (). The electrode arrangement is characterized in that the cathode material surface () is constituted by an evaporation-active part () supporting the plasma discharge () and an evaporation-inactive part () not supporting the plasma discharge. Preferably, a motion-producing means () is provided for moving the evaporation-inactive part () over the cathode material surface () in order to reduce deposit of material due to he first material component on the cathode material surface ().

Electrode arrangement

The invention relates to a method and device for the determination of the gas permeability of a container, for example, a PET bottle. Said container is enclosed by a sheath, which hermetically seals the container from the environment. The intermediate space, between the container and the sheath, has only a very small volume in comparison to the volume of the container. The determination of the gas permeability is begun by bringing said intermediate space to, for example, atmospheric pressure, whilst the container is filled with a test gas by means of a special feed, until the container is at an overpressure relative to the intermediate space. The pressure in the intermediate space increases by means of the resulting diffusion of the test gas through the wall of the container into said intermediate space. The increase in pressure per unit time is a measure of the permeability of the container.

Method and device for the determination of the gas permeability of a container

The coated multilayer structure comprising a polymeric base layer, an inorganic oxide gas barrier layer on a surface of the polymeric base layer, and a top coat on the inorganic oxide gas barrier layer, the top coat comprising a soluble compound capable of reducing the permeability of the multilayer structure to gas or vapor. A method for enhancing the gas or vapor barrier properties of a multilayer polymeric/inorganic oxide structure is also disclosed. According to one embodiment, SiOx coated polyethylene terephthalate containers are coated with a gas or vapor barrier enhancing top coat.

Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same

A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.

Vacuum chamber for flat substrates

A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a second vacuum valve (12) therein. A blowout valve (17) is connected to the connecting line (20) between the first pump (14) and the second valve (12). A secondary intake line (19) having therein a third vacuum valve (13) is connected between the vacuum chamber (5) and the intake of the second vacuum pump (15).

Apparatus for the rapid evacuation of a vacuum chamber

The invention relates to a magnet configuration with permanent magnets (5, 6) around a yoke (2, 3, 4) connecting these permanent magnets (5, 6). The magnetic field strength of this magnet configuration is varied thereby that in the region of the yoke (2, 3, 4) at least one rotatable body (8) is provided which comprises at least two spatially separated materials (9, 10) with different magnetic properties.

Magnet configuration with permanent magnets

For the evacuation of a low-vacuum chamber (4) and of a high-vacuum chamber (5), two pump trains (6, 7) are provided, each consisting of a vacuum pump unit (8, 9) and a forepump unit (10, 11). The forepump unit (11) of the pump train (7) of the high-vacuum chamber (5) can draw selectively from the vacuum pump unit (9) of the high-vacuum chamber (5) or from a high-vacuum pump unit (12) connected likewise to the high-vacuum chamber (5). The vacuum pump unit (9) can aspirate either from the highvacuum chamber (5) or from the low-vacuum chamber (4) and discharge to the forepump unit (10) of pump train (6) or to the forepump unit (11) of pump train (7).

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Freigericht, Germany

Thomas Gebele