J.a. Woollam Co.

University of Nebraska

Thomas E Tiwald

Craig M Herzinger

John A Woollam

Martin M Liphardt

Blaine D Johs

Ronald A Synowicki

Galen L Pfeiffer

Ping He

Steven E Green

Jeffrey S Hale

Tino Hofmann

Mathias M Schubert

Stefan Schoeche

Gregory K Pribil

Sean R Knight

James D Welch

Jeremy A Van Derslice

James N Hilfiker

Corey L Bungay

Greg K Pribil

Philipp Kuehne

Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

Integrated vacuum-ultraviolet, mid and near-ultraviolet, visible, near, mid and far infrared and terahertz optical hall effect (OHE) instrument, and method of use

System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of use

Methodology for determining optical functions of thin films with enhanced sensitivity to 'p' polarized electromagnetic radiation reflected from both interfaces of an absorbing film.

Method to enhance sensitivity to surface normal optical functions of anisotropic films using attenuated total reflection

An ellipsometer system comprising a small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.

Small volume cell

A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.

A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

Sample investigating system and method of use

A small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.

A system for reducing reflections of a beam of electromagnetic radiation from the opposite, back, surface of an anisotropic sample, including methodology for investigating the incident, front, surface thereof with electromagnetic radiation, and analyzing the data as if the sample is isotropic.

Ellipsometric investigation of anisotropic samples

A system for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

Back surface reflection reduction systems and methodology

Sample investigating system

Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.

Sample analysis methodology utilizing electromagnetic radiation

A system for determination of optical constants of liquids, including provision for reducing stress induced effects while obtaining data.

System for reducing stress induced effects during determination of fluid optical constants

Improved methodology for monitoring deposition or removal of material to or from a process and/or wittness substrate which demonstrates a negative eat some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angle-of-Incidence (AOI) to monitor deposition of and/or removal of minute amounts of materials onto, or from, said process and/or witness substrate. The methodology can optionally monitor ellipsometric PSI, and involves simultaneously or sequentially applying non-P-polarized electromagnetism at the same angle of incidence, or electromagnetic radiation of any polarization at a different angle-of-incidence and wavelength to the process or wittness substrate and application of conventional ellipsometric analysis.

Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface

Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.

Growing community of inventors

Lincoln, NE, United States of America

Thomas E Tiwald