Cymer, Inc.

Thomas E McKelvey

Richard M Ness

Richard C Ujazdowski

Walter Dale Gillespie

Thomas D Steiger

Vladimir B Fleurov

Bryan George Moosman

J Martin Algots

Brett D Smith

Frederick A Palenschat

A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.

6 KHz and above gas discharge laser system

Growing community of inventors

Ramona, CA, United States of America

Thomas E McKelvey