Checkpoint Technologies LLC

Optical Specialties, Inc.

Thomas E Clawges

Guoqing Xiao

David J Morgan

Horst E Groneberg

Robert T LoBianco

James Daniel Olson

Adam C Rhoads

An optical probe system for probing an electronic device includes a sample plate configured to hold a target device comprising an integrated circuit, a temperature control chamber configured to hold a fluid to control the temperature of the target device, a first optical objective system that can collect reflected or emitted light from the integrated circuit in the target device, a rotational stage including ports that can hold the optical objective systems, a vertical translation stage that can move the first optical objective system in a vertical direction substantially perpendicular to the sample plate, and an x-y translation stage that can move the first optical objective system in horizontal directions. A portion of the first optical objective system is moved through the temperature control chamber to allow the first optical objective system to focus at the target device.

Multi-magnification high sensitivity optical system for probing electronic devices

An optical probe system includes a sample plate for holding a target device comprising an integrated circuit, and a rotational stage that includes a plurality of ports configured to receive and hold a plurality of optical objective systems that can collect reflected or emitted light from the integrated circuit. At least one of the ports includes a centering plate mounted on the rotational stage and configured to conduct a translational movement on the rotational stage. The port also includes a gimbal plate mounted on the centering plate and that can be tilted relative to the centering plate. A first optical objective system that is mounted on the gimbal plate can be centered by the center plate and aligned by the gimbal plate.

Optical probe system having accurate positional and orientational adjustments for multiple optical objectives

An optical probe system for probing an electronic device includes a sample plate that can hold a target device comprising an integrated circuit, an optical objective system that can collect reflected or emitted light from the integrated circuit in the target device, and a temperature control chamber that can hold a fluid to control the temperature of the target device.

Multi-resolution optical probing system having reliable temperature control and mechanical isolation

Optical probing system having reliable temperature control

A connector that couples a leg of one object to a leg of a second object to prevent relative translation motion between these two objects and that does not transmit substantial vibrational energy between these objects. This connector is attached at a base of each object and is preferably attached to a pad of damping material at the base of each object.

Kinematic isolation stand connector

An apparatus having a set of apertures of selected diameters, each aperture being positioned in a multiaperture assembly that can be moved to bring selectively each of these apertures into a path of a beam. This enables control of the diameter of an aperture in a beam and also enables accurate positioning of that aperture so that it is centered on the beam where it is moved to a position of alignment with the beam.

Growing community of inventors

Pleasanton, CA, United States of America

Thomas E Clawges