Leybold Vakuum Gmbh

Oerlikon Leybold Vacuum Gmbh

Leybold Gmbh

Leybold Vacuum Gmbh

Oerlikon Leybold Vaccum Gmbh

Thomas Dreifert

Wolfgang Giebmanns

Roland Müller

Dirk Schiller

Hartmut Kriehn

Rudolf Bahnen

Robert Jenkins

Klaus Rofall

Manfred Behling

Lothar Brenner

Lutz Arndt

Michael Froitzheim

Peter Birch

Max Pelikan

Hans-Rochus Gross

Clive Tunna

Dirk Stratmann

Frank Sch&ouml;nborn

J&uuml;rgen Meyer

Michael H&ouml;lzemer

Magnus Janicki

Daniel Schneidenbach

Nils Olesen

Stefan Wolter

Robert Jentkins

Uwe Zöllig

A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Screw vacuum pump without internal cooling

A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Vacuum pump screw rotors with symmetrical profiles on low pitch sections

A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, is provided that includes a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber to be evacuated. As seen in the feeding direction of the main vacuum pump an auxiliary vacuum pump is arranged which is in particular a Roots pump. An outlet area of the main vacuum pump is connected with a main outlet on the one hand and an inlet of the auxiliary vacuum pump on the other hand. Further, an outlet of the auxiliary vacuum pump is connected with the main outlet.

Vacuum pump system

A Roots pump comprises a plurality of multi-toothed rotary pumps, each forming a pump stage, and connection channels connecting respective adjacent pump stages. The invention provides that the connection channels are arranged in partitioning walls separating the adjacent pump stages.

Roots pump connection channels separating adjacent pump stages

A vacuum pump comprises pumping elements arranged in a pumping chamber. An electric motor drives the pumping element. A frequency inverter is provided for changing the rotational speed of the electric motor. The frequency inverter is arranged in a frequency inverter housing immediately connected to the pump housing. An air cooler and a liquid cooler are arranged in the frequency inverter housing to cool the frequency inverter.

Vacuum pump

A pump () is provided with a housing (), having an inlet () and an outlet (), a drive (), a fixed cylinder () centered on a mid-axis (), a displacer (), rotating eccentrically within the cylinder (), a crank drive () for the displacer (), a circumferential sickle-shaped pumping chamber () between the cylinder () and displacer () and a helical sealing element () in the pumping chamber (). The pump is a dry vacuum pump, whereby the displacer () circulates in the cylinder () without making contact.

Eccentric pump and method for operation of said pump

A vacuum pump () comprises at least one rotor shaft () having a rotor section () with a rotor (), a bearing section () with a bearing (), and a shaft sealing system () that is axially situated between the rotor section () and the bearing section (). The shaft sealing system () axially comprises, on the side of the rotor, a gas seal () and, on the side of the bearing, an oil seal (). The shaft sealing system () additionally comprises, between the gas seal () and the oil seal (), a separating chamber, which surrounds the rotor shaft () and is ventilated by at least one separating chamber ventilation duct (). This enables the pressure difference that decreases via the gas seal and the pressure difference that decreases via the oil seal to be adjusted. An appropriate adjustment can prevent oil on the bearing side from passing through the oil seal toward the separating chamber.

A vacuum pump () comprising a pump chamber casing () accommodating two co-operating rotors () which are respectively arranged on a shaft (). A bearing/gear chamber () is disposed adjacent to the pump chamber casing () in which the rotor shafts () are cantilevered and provided with a synchronisation gear (). A drive motor () whose drive shaft () extending parallel to the rotor shafts () and is provided with a drive gear (). A gear stage () is disposed between the drive shaft () and one of the rotor shafts (). In order to provide a machine of this type which can be embodied in a compact form, the drive gear () of the drive shaft () engages directly with a driven gear () on one of the rotor shafts (), forming the gear stage ().

Two shaft vacuum pump with cantilevered rotors

A vacuum pump has two shafts () and two rotors () which co-operate with each other and which are fixed to the shafts. The rotors are cantilevered on the shafts. The rotors are fixed to the shafts in a manner which is devoid of backlash, even during temperature changes. In order to achieve this, the shafts () are made of a material having a modulus of elasticity which is as high as possible, e.g., steel. The rotors () are made of a material having a density which is as low as possible, e.g., aluminum or a titanium alloy. Structures (; etc.) are provided to ensure that the rotors () are fixed to the shafts () in a manner which is devoid of backlash at all operating temperatures.

Two-shaft vacuum pump

A dry compressing vacuum pump ( ) has a continuous or graduated inner compression. A gas ballast device ( ) selectively adds a ballast gas to a pumped gas. The gas ballast device has an isolating valve ( ), a non-return valve ( ) which prevents the escape of gases from the pump through the gas ballast device to the outside, and a pressure differential valve ( ).

Dry compressing vacuum pump having a gas ballast device

A cooled screw vacuum pump has a housing ( ) two rotating systems ( ) consisting each of a screw rotor ( ) and a shaft ( ), a floating device supporting the rotors having, on each shaft, two mutually spaced bearings ( ) and an empty space ( ) arranged in each rotor ( ) open on the bearing side, wherein is respectively located an element cooling the rotor internally. In order to improve cooling it is suggested that the bearing ( ) of the support located on the rotor side, is placed outside the rotor ( ) empty space ( ), such that in said empty space ( ) there is more room available for obtaining efficient cooling.

Cooled screw vacuum pump

A screw vacuum pump ( ) has rotors ( ), bearings ( ), a casing ( ), a suction side ( ), and a delivery side ( ). Each of the rotors includes at least two rotor sections, a suction side rotor section ( ) and a delivery side rotor section ( ). The two rotor sections are separately constructed and joined together in a positive, form-fitting or friction locking manner. The suction side rotor section is preferably larger in diameter and constructed with looser tolerances as compared to the delivery side rotor section. The suction side rotor is preferably of an inexpensive material such as aluminum while the discharge side rotor is preferably constructed of a higher performance material such as stainless steel. The rotor sections are supported on a rotor shaft ( ) into which cooling fluid is injected through a cooling pipe ( ). Cooling fluid from the shaft is also circulated through the bearings and passages in the casing eventually reaching a sump ( ) in preparation for recirculation.

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Kerpen, Germany

Thomas Dreifert