Corning Incorporated

Cornell Research Foundation Inc.

Thomas David Kudrle

Noel C MacDonald

Damien Craig Rodger

Gregory A Kirkos

Gordon M Shedd

Carlos Horacio Mastrangelo

ChuanChe Wang

Hercules Neves

Marc Waelti

James Ching-Ming Hsiao

Mirela Gabriela Bancu

One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices. Other embodiments are directed to methods of depositing a thin film on the back of a MEMS device.

Electrostatically actuated micro-electro-mechanical devices and method of manufacture

Suspended single crystal silicon (SCS) beams coated with metal form transmission lines that are used in MEMs type microactuated phase shifters and switches. The characteristic impedance of any section of the transmission lines is a function of the beam spacing in that section. Microactuators, such as comb-drive actuators, are connected to the beams to vary this spacing in a controllable manner. A continuos phase shifter is formed that consists of two tunable capacitance sections connected by a matching section that reduces reflections and improves compliance of the beams to reduce the energy required to move the beams.

Transmission line structures for use as phase shifters and switches

Growing community of inventors

Cambridge, MA, United States of America

Thomas David Kudrle