Semiconductor Technologies & Instruments Pte. Ltd.

August Technology Corp.

Thomas Casey Carrington

Charles K Harris

Clyde Maxwell Guest

Rajiv Roy

Weerakiat Wahawisan

Hak Chuah Sim

Sanjeev Mathur

John Mark Thornell

Ramiro Castellanos-Nolasco

Younes Chtioui

A system for inspecting components is provided. The system includes an axial lighting system that illuminates the component with axial lighting to allow one or more features of the component to be located, such as by causing protruding features to be brighter than the background and recessed features to be darker than the background. An off-axis lighting system illuminates the component with off-axis lighting in the absence of the axial lighting to allow the component to be inspected to locate one or more features, such as a bump contact.

System and method for inspection using off-angle lighting

A system for inspecting a component, such as a die formed on a silicon wafer, is provided. The system includes a two dimensional inspection system that can locate one or more features, such as bump contacts on the die, and which can also generate feature coordinate data. The system also includes a three dimensional inspection system that is connected to the two dimensional inspection system, such as through an operating system of a processor. The three dimensional inspection system receives the feature coordinate data and generates inspection control data.

System and method for inspecting bumped wafers

Growing community of inventors

Plano, TX, United States of America

Thomas Casey Carrington