Texas Instruments Corporation

Thomas C Bimer

Edwin G Millis

Malvern L Creps

Alton D Lewis

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.

Semiconductor slice cassette transport unit

A portable carrier (10) for storage and transportation of semiconductor slice cassettes in a clean room environment which shields the semiconductor slices from VLF air in people occupied areas includes a base (12), a pair of spring-mounted cradles (14) mounted on base (12) for supporting the semiconductor slice cassette and a cover (16) for disposal on base (12) to provide a sealed volume. Carrier (10) also includes a latch (20) for removably coupling cover (16) onto base (12). Latch (20) includes a handle (22) at the terminal end thereof to facilitate handling and transporting of carrier (10) when cover (16) is locked in place on base (12). A latch tube (24) is mounted proximate the center of base (12) and cooperates with latch (20) to couple cover (16) onto base (12). A pair of particle filters (26) are mounted on base (12) and positioned beneath cradles (14) to equalize the pressure on the interior and exterior of carrier (10) and thus reduce the pressure drop across seal (18) to zero under normal conditions. A pair of guides (28) are positioned proximate the rear of base (12) to either side thereof and outside seal (18). Guides (28) are adapted to be disposed through apertures provided in cover (16) to facilitate placement of cover (16) onto base (12) and prevent misalignment thereof.

Growing community of inventors

Albuquerque, NM, United States of America

Thomas C Bimer